Signal Location with Frequency Mapping Larry Ross SEMICAPS Pte Ltd. 28 Ayer Rajah Crescent #03-01 Singapore 139959 Tel: +1 (408) 206-8225 E-mail: [email protected] Website: www.semicaps.com 26 January 2009 Centric vs. Aplanatic RSIL, EUFANET, Slide 1 SEMICAPS

Far-field vs. Aplanatic RSIL Air-gap SOM Image

Aplanatic RSIL SOM Image

Laser: 1340nm Objective: 100X, Zoom 2 Backside Thickness: 100μm

Laser: 1340nm Objective: 20X, Zoom 4 Backside Thickness: 100μm

Ref. Goh SH, Private Communication, Mar 08

SOM with PEM Option, 080221, Slide 2 SEMICAPS Confidential

Aplanatic RSIL Results Aplanatic RSIL RSIL Diameter: 1mm 1340nm laser Region 1

SOM with PEM Option, 080221, Slide 3 SEMICAPS Confidential

Aplanatic RSIL Results Aplanatic RSIL RSIL Diameter: 1mm 1064nm laser Region 1

SOM with PEM Option, 080221, Slide 4 SEMICAPS Confidential

Experimental results on 1340nm laser

0.4 µm pitch

Semicaps SOM • 50X Objective (0.42NA) • Digital Zoom 3 SOM with PEM Option, 080221, Slide 5 SEMICAPS Confidential

0.4 µm pitch

Semicaps SOM • 20X Objective (0.24NA) • Digital Zoom 2 • 1mm diameter Aplanatic RSIL 5

5X – LSM Image

SOM with PEM Option, 080221, Slide 6 SEMICAPS Confidential

20X – LSM Image

SOM with PEM Option, 080221, Slide 7 SEMICAPS Confidential

20X – Frequency Mapping (27.5MHz)

SOM with PEM Option, 080221, Slide 8 SEMICAPS Confidential

20X – Color Overlay (27.5MHz)

SOM with PEM Option, 080221, Slide 9 SEMICAPS Confidential

50X – LSM Image

SOM with PEM Option, 080221, Slide 10 SEMICAPS Confidential

50X – Frequency Mapping (27.5MHz)

SOM with PEM Option, 080221, Slide 11 SEMICAPS Confidential

50X – Color Overlay (27.5MHz)

SOM with PEM Option, 080221, Slide 12 SEMICAPS Confidential

CSIL – LSM Image

SOM with PEM Option, 080221, Slide 13 SEMICAPS Confidential

CSIL – Frequency Mapping (27.5MHz)

SOM with PEM Option, 080221, Slide 14 SEMICAPS Confidential

CSIL – Color Overlay (27.5MHz)

SOM with PEM Option, 080221, Slide 15 SEMICAPS Confidential

Air Gap

SOM with PEM Option, 080221, Slide 16 SEMICAPS Confidential

CSIL

SOM with PEM Option, 080221, Slide 17 SEMICAPS Confidential

CSIL – Double Power

SOM with PEM Option, 080221, Slide 18 SEMICAPS Confidential

CSIL

SOM with PEM Option, 080221, Slide 19 SEMICAPS Confidential

CSIL – Color Overlay (27.5MHz)

SOM with PEM Option, 080221, Slide 20 SEMICAPS Confidential

SNR vs. Power 2X Power

22X Power

SOM with PEM Option, 080221, Slide 21 SEMICAPS Confidential

CSIL vs. 50X – 250k Averages (1.5s)

SOM with PEM Option, 080221, Slide 22 SEMICAPS Confidential

CSIL vs. 50X – 1.0M Averages (6.0s)

SOM with PEM Option, 080221, Slide 23 SEMICAPS Confidential

end

SOM with PEM Option, 080221, Slide 24 SEMICAPS Confidential