Interconnects • The previous result assumes that signals can propagate instantaneously across interconnects • In reality interconnects are metal or polysilicon structures with associated resistance and capacitance. • That, introduces signal propagation delay that has to be taken into account for reliable operation of the circuit
Paulo Moreira
Technology scaling
7
Interconnects
Minimum Pitch: 0.2 µm Minimum Width 0.2 µm
§ Capacitance to substrate becomes irrelevant § Capacitance to neighboring signal becomes dominating § Noise to neighboring signal also not negligible § Extraction for Timing simulation horribly complicated: tools absolutely mandatory Paulo Moreira
Technology scaling
8
Interconnects
Paulo Moreira
Technology scaling
9
Interconnects Conductor
L
R=R
L W
W
Film n-well p+, n+ diffusion (salicided) polysilicon (salicided) Metal 1 Metal 2, 3 and 4 Metal 5
Sheet resistance (Ω/square) 310 4 4 0.12 0.09 0.05 (Typical values for an advanced process)
Paulo Moreira
Technology scaling
10
Interconnects Via Metal 1 Via
• Via or contact resistance depends on: – The contacted materials – The contact area
Paulo Moreira
Metal 2
Via/contact M1 to n+ or p+ M1 to Polysilicon V1, 2, 3 and 4
Technology scaling
Rvia
Resistance (Ω) 10 10 7
11
Interconnects Routing capacitance Cross coupling capacitance W L
L
Oxide
C = Cf0 2 L + Cp0 W L Cx = Cx0 L
Substrate Fringing field capacitance Parallel-plate capacitance
Interconnect layer Polysilicon to sub. Metal 1 to sub. Metal 2 to sub. Metal 3 to sub. Paulo Moreira
• Three dimensional field simulators are required to accurately compute the capacitance of a multi-wire structure Paulo Moreira
Technology scaling
13
Interconnects Interconnect Zin
Zout
• Delay depends on: – Impedance of the driving source – Distributed resistance/capacitance of the wire – Load impedance
• Distributed RC delay: – – – –
Can be dominant in long wires Important in polysilicon wires (relatively high resistance) Important in salicided wires Important in heavily loaded wires
Paulo Moreira
Technology scaling
14
Interconnects Long line L
R0
1 ⋅ R0 ⋅ C0 ⋅ L2 2
C0
1 t d = R0 ⋅ C0 ⋅ L2 + tbuff 4 L/2
Delay optimization L/2
Paulo Moreira
td =
Technology scaling
15
Clock distribution • Clock signals are “special signals” • Every data movement in a synchronous system is referenced to the clock signal • Clock signals: – Are typically loaded with high fanout – Travel over the longest distances in the IC – Operate at the highest frequencies
Paulo Moreira
Technology scaling
16
Clock distribution Data Path in
CLKi-1
D
Q
D
Logic
Q
CLKi
Logic
D
Q
out
CLKi+1
• “Equipotential” clocking: – In a synchronous system all clock signals are derived from a single clock source (“clock reference”) – Ideally: clocking events should occur at all registers simultaneously … = t(clki-1) = t(clki) = t(clki+1) = … – In practice: clocking events will occur at slightly different instants among the different registers in the data path Paulo Moreira
Technology scaling
17
Clock distribution Clock skew
tint Q
CLKi
D
t'int
Logic
Q
D
CLKi+1 tsetup tpFF+tint+tp,comb+t'int
Data in (reg. i+1) CLKi CLKi+1
Negative clock skew Positive clock skew Paulo Moreira
Technology scaling
18
Clock distribution • Skew: difference between the clocking instants of two “sequential” registers: Skew = t(CLKi)- t(CLKi+1) • Maximum operation frequency: 1 ' Tmin = = t dFF + tint + t p ,comb + tint + t setup + t skew f max • Skew > 0, decreases the operation frequency • Skew < 0, can be used to compensate a critical data path BUT this results in more positive skew for the next data path!
Paulo Moreira
Technology scaling
19
Clock distribution • Different clock paths can have different delays due to: – Differences in line lengths from clock source to the clocked registers • Differences in passive interconnect parameters (line resistance/capacitance, line dimensions, …)
– Differences in delays in the active buffers within the clock distribution network: • Differences in active device parameters (threshold voltages, channel mobility)
• In a well designed and balanced clock distribution network, the distributed clock buffers should be the principal source of clock skew
Paulo Moreira
Technology scaling
20
Clock distribution
Clocked registers
Clock source
• Clock buffers: – Amplify the clock signal degraded by the interconnect impedance – Isolate the local clock lines from upstream load impedances
NRZI non-return to zero invert on ones. â Manchester and Bi-Phase Mark. â 3B/4B, 5B/6B and 8B/10B, done in groups of bits before serialization. BiPhase Mark.
The CMOS inverter. ⢠Technology. ⢠Scaling. ⢠Gates ..... For acceptable phase margin. Place the zero 1/Ï .... Add VCO phase noise. Update the VCO period ...
D. A. Johns and K. Martin, âAnalog Integrated Circuit Design,â John Wiley & Sons 1997, ISBN 0- ... B. Razavi, âA Study of Phase Noise in CMOS Oscillators,â IEEE Journal on Solid-State ... http://www.ife.ee.ethz.ch/~ichsc/ichsc_chapter11.pdf.
Design of Analog Integrated Circuits and Systems by Kenneth R. ... Design of Analog CMOS Integrated Circuits ... CMOS Circuit Design, Layout, and Simulation.
Clock skew control and frequency multiplication. Ext. CLK. Clock pad. PLL ...... Algorithm: ⢠Slice the time in very thin intervals (much smaller than T vco. ).
The silicon area of large memory cells is dominated by the size of the memory core, it is thus crucial to keep the size of the basic storage cell as small as possible.
An active low pass filter. ⢠A charge-pump and a capacitor .... Can we run the starved inverter infinitely slow?. ⢠... Signal and the Inverted signal available.
that of a DLL you notice some similarities but as well some very fundamental differences: .... 3rd always buffer the VCO signal to make the transfer ..... âMonolithic Phase-Locked Loops and Clock Recovery Circuits Theory and Design,â ..... In one
Dec 17, 2004 - M.J.M. Pelgrom et al., âA 25-Ms/s 8-bit CMOS A/D Converter for Embedded Applicationâ, ... components can be attributed to two classes of effects. .... Technical Digest of the IEEE International Electron Device Meeting 1997, pp ...
... pattern to the wafer surface. â Process the wafer to physically pattern each layer of the IC ... (photo resist: light-sensitive organic polymer). ⢠The photoresist is exposed to ultra violet light: ... active by an rf-generated plasma anisotr
CMOS power budget: â Dynamic power consumption: ⢠Charging and discharging of capacitors. â Short circuit currents: ⢠Short circuit path between power rails ...
... CMS tracker analogue data link. â The CMS tracker data path. â The linear laser-driver ... Monitoring. Serial/Parallel. Local. Address. Control & Data. Interface.
Tx. Detector channel. LHC clock (40MHz). Gain. 82 728 chan n e ls (barrel +. 2 en d caps). Radiation hard environment. CMS Electromagnetic Calorimeter.
thought its major weaknesses -- the lousy computer part, software envelopes and LFO -- ..... seconds to complete depending on the tuning of your instrument.
This manual is for the Beta ... library, the service manual and MiniSystem's blog, I was able to get it working to the .... instructions to do this are available online. 7.
May 20, 2007 - Below an excerpt form correspondence with Hans Camenzind: ..... This means that any spectral content of the phase noise that is above 10 ...