Marconi Applied Technologies CCD55-30 High Performance CCD Sensor FEATURES *
1242 (H) by 1152 (V) Pixel Format
*
28 by 26 mm Active Area
*
Visible Light and X-Ray Sensitive
*
New Improved Very Low Noise Amplifier for Slow-Scan Systems and Large Signal Amplifier for Binned Operation
*
Symmetrical Anti-Static Gate Protection
*
Radiation Tolerant
*
Gated Dump Drain on Output Register
INTRODUCTION The CCD55-30 is one of the CCD55 range of very large area CCD image sensors primarily intended to suit the requirements of astronomy, medical diagnostic and scientific measuring instruments. Standard three-phase clocking and buried channel charge transfer are employed. The readout register has a high performance low noise amplifier at one end for slowscan applications and a high speed amplifier at the other end. The image area is split into two sections which can be clocked separately for frame transfer operation. The CCD55-30 is an upgraded version of the CCD05-30 with improved output amplifiers and is also available in backthinned format. The CCD55-30 is pin compatible with the CCD05-30, except that the top two amplifiers are not provided. The CCD55-30 scientific image sensor is primarily specified for operation in a full-frame imaging mode with slow-scan readout from the whole image area through the low noise amplifier and is tested at a temperature of approximately 243 K. Other operating modes are also possible, including use of the large signal amplifier (but at higher noise) and pixel binning. Potential users are invited to discuss their applications with Marconi Applied Technologies to ensure optimum performance. In common with all other Marconi Applied Technologies CCD sensors, the CCD55-30 is available with a fibre-optic window or taper, a UV coating or a phosphor coating for hard X-ray detection. Designers are advised to consult Marconi Applied Technologies should they be considering using CCD sensors in abnormal environments or if they require customised packaging.
TYPICAL PERFORMANCE (Low noise amplifier) Pixel readout frequency . Output amplifier sensitivity Peak signal . . . . . Dynamic range . . . . Spectral range . . . . Readout noise (at 243 K, 20 Q.E. at 700 nm . . . . Peak output voltage . .
. . . . . . . . . . kHz) . . . .
. . . . . . . .
. 20 ± 7 000 kHz . . . . 3 mV/e7 . . . 450 ke7/pixel . 150 000:1 420 ± 1060 nm . . . . 3 e7 rms . . . 45 % . . . . 1.35 V
GENERAL DATA Format Image region (section A) . . Image region (section B) . . Image area (sections A + B) Pixel pitch (row and column)
. . . .
. 1252(H) x 576(V) pixels . 1252(H) x 576(V) pixels . . 28.17 x 25.92 mm . . 22.5 x 22.5 mm
Package Outline dimensions . . . . . Number of pins . . . . . . Inter-pin spacing . . . . . Inter-row spacing . . . . . Inner row spacing (across sensor) Window . . . . . . . . Mounting position . . . . .
. . . . . . .
. . . . . . .
. . . . . . .
. . . . . . .
53.3 x 33.0 mm . . . . 44 . . 2.54 mm . . 2.54 mm . . 43.18 mm removable glass . . . . any
Marconi Applied Technologies Limited, Waterhouse Lane, Chelmsford, Essex CM1 2QU England Telephone: +44 (0)1245 493493 Facsimile: +44 (0)1245 492492 e-mail:
[email protected] Internet: www.marconitech.com Holding Company: Marconi p.l.c. Marconi Applied Technologies Inc. 4 Westchester Plaza, PO Box 1482, Elmsford, NY10523-1482 USA Telephone: (914) 592-6050 Facsimile: (914) 592-5148 e-mail:
[email protected]
#2000 Marconi Applied Technologies Limited
A1A-CCD55-30 Issue 1, March 2000 411/5714
PERFORMANCE Min
Typical 450k
Max ±
e7/pixel
± ±
V V
65k
e7/pixel/s
± ±
% %
Peak charge storage (see note 1)
300k
Peak output voltage (unbinned): low noise amplifier large signal amplifier
± ±
Dark signal at 293 K (see notes 2 and 3)
±
Charge transfer efficiency (see note 4): parallel serial
± ±
Output amplifier sensitivity: low noise amplifier large signal amplifier
2.0 0.9
3.0 1.2
4.0 1.6
Readout noise at 243 K (see notes 3 and 5) (low noise amplifier, grade 0)
±
3
5
rms e7/pixel
Readout frequency (see note 6): low noise amplifier large signal amplifier
± ±
50 1000
7000 9000
kHz kHz
Response non-uniformity (std. deviation)
±
1
3
% of mean
Dark signal non-uniformity at 293 K (see notes 3 and 7) (std. deviation, s)
±
2000
5000
e7/pixel/s
Register and output node capacity relative to image section: towards low noise amplifier towards large signal amplifier
± ±
1.35 0.54 20k 99.9999 99.9993
mV/e7 mV/e7
2.0 4.0
± ±
Typical
Max
4.2
±
nF
±
pF
ELECTRICAL INTERFACE CHARACTERISTICS Min Electrode capacitances (measured at mid-clock level): A1 or B1 interphase
±
C1 interphase
±
110 13
A11, B11 to SS
±
A12, A13, B12, B13 to SS
±
±
nF
±
nF
C1, each phase to SS/DD/DG
±
135
±
pF
Low noise amplifier (A2) Large signal amplifier (A1)
±
400
±
O
±
250
±
O
8.4
Output impedances:
NOTES 1. Signal level at which resolution begins to degrade. 2. The typical average (background) dark signal at any temperature T (kelvin) between 230 and 300 K is given by: Qd/Qd0 = 122T3e76400/T where Qd0 is the dark current at 293 K. Note that this is typical performance and some variation may be seen between devices. Below 230 K additional dark current components with a weaker temperature dependence may become significant.
CCD55-30, page 2
3. This test is carried out on all CCD55-30 sensors. 4. CCD characterisation measurements made using charge generated by X-ray photons of known energy. 5. Measured using a dual-slope integrator technique (i.e. correlated double sampling) with a 10 ms integration period. 6. Readout above the values specified may be achieved but performance to the parameters given cannot be guaranteed. 7. Measured between 233 and 253 K, excluding white defects.
#2000 Marconi Applied Technologies
BLEMISH SPECIFICATION Traps
Slipped columns Black spots White spots
White column Black column
Pixels where charge is temporarily held. Traps are counted if they have a capacity greater than 200 e7 at 243 K. Are counted if they have an amplitude greater than 200 e7. 410% contrast at half saturation, 243 K. Are counted when they have a generation rate 10 times the specified maximum dark signal generation rate at 293 K (measured between 233 and 253 K). The typical temperature dependence of white spot blemishes is that of the average dark signal and is given by: Qd/Qd0 = 122T3e76400/T A column which contains at least 9 white defects. A column which contains at least 9 black defects.
GRADE
0
1
2
Column defects: black or slipped white
0 0
2 0
6 0
Traps 4200 e7
2
5
12
White spots
42
42
65
Black spots
20
40
200
Grade 5
Devices which are fully functioning but with image quality below that of grade 2 and which may not meet all other performance parameters. Minimum separation between adjacent black columns . . . . . . . . 50 pixels Note The effect of temperature on defects is that traps will be less noticeable at higher temperatures but more may appear below 243 K. The amplitude of white spots and columns will decrease rapidly with temperature.
#2000 Marconi Applied Technologies
CCD55-30, page 3
TYPICAL OUTPUT CIRCUIT NOISE
(Low noise amplifier, measured using clamp and sample)
NOISE EQUIVALENT SIGNAL (e7 r.m.s.)
10
7855
5
0 10k
50k
100k
500k
1M
FREQUENCY (Hz)
TYPICAL SPECTRAL RESPONSE (No window) 50
6908
45 40 35
QUANTUM EFFICIENCY (%)
30 25 20 15 10 5 0
400
500
600
700
800
900
1000
1100
WAVELENGTH (nm)
TYPICAL VARIATION OF DARK SIGNAL WITH SUBSTRATE VOLTAGE (Two I1 phases held low) 70
7872
60 50
DARK SIGNAL (k e7/pixel/s)
40 TYPICAL RANGE 30 20 10 0
0 1 2 3 SUBSTRATE VOLTAGE VSS (V)
CCD55-30, page 4
4
5
6
7
8
9
10
11
#2000 Marconi Applied Technologies
TYPICAL VARIATION OF DARK CURRENT WITH TEMPERATURE 105
7510
104
103
102
DARK CURRENT (e7/pixel/s)
10
1
1071
1072 780 760 PACKAGE TEMPERATURE (8C)
740
720
0
20
40
DEVICE SCHEMATIC The charge detection amplifier A1 is optimised for large signal, high speed operation, whereas amplifier A2 is optimised for very low noise under cooled slow-scan operation. 7856
1
44
IG
2
43
IG
DG
3
42
DG
4
41
5
40
6
39
7
38
ABD
SECTION A
ABD
37
1252 x 576 ELEMENTS
A13
8
36
A13
A12
9
35
A12
A11
10
34
A11
SS
11
33
SS
B11
12
32
B11
B12
13
31
B12
B13
14
30
B13
DD
15
OD1
16
29
DD
OS1
17
28
OD2
DOS1
18
27
OS2
RD1
19
26
RD2
1R1
20
25
1R2
C11
21
24
C12
OG
22
23
C13
SECTION B 1252 x 576 ELEMENTS A1
A2 SECTION C 1252 ELEMENTS
17 BLANK ELEMENTS
#2000 Marconi Applied Technologies
CCD55-30, page 5
CONNECTIONS, TYPICAL VOLTAGES AND ABSOLUTE MAXIMUM RATINGS PIN 1
REF
DESCRIPTION
±
No connection
PULSE AMPLITUDE OR DC LEVEL (V) (see note 8) Min Typical Max
MAXIMUM RATINGS with respect to VSS
±
±
±
±
2
IG
Isolation gate (see note 9)
75
0
1
+20 V
3
DG
Dump gate (see note 10)
75
0
1
+20 V
4
±
No connection
±
±
±
±
5
±
No connection
6
ABD
Anti-blooming drain (see note 11)
7
±
No connection
±
±
±
±
8
A13
Section A drive pulse
10
12
15
+20 V
9
A12
Section A drive pulse
10
12
15
+20 V
10
12
15
+20 V
0
9
10
±
10
12
15
+20 V
10
12
15
+20 V
±
±
±
±
20
22
25
70.3 to +25 V
10
A11
Section A drive pulse
11
SS
Substrate (see note 12)
12
B11
Section B drive pulse
13
B12
14
B13
Section B drive pulse
10
12
15
+20 V
15
DD
Dump drain
20
22
25
70.3 to +25 V
16
OD1
Output drains (A1)
27
29
30
70.3 to +30 V
17
OS1
Output transistor source (A1)
see note 13
70.3 to +30 V
18
DOS1
Dummy output source (A1)
see note 13
70.3 to +30 V
19
RD1
Reset transistor drain (A1)
20
1R1
Output reset pulse (A1)
21
C11
C register readout (see note 14)
22
OGC
C register output gate (A1 and A2)
23
C13
24 25
Section B drive pulse
15
17
19
70.3 to +25 V
8
12
15
+20 V
10
12
15
+20 V
1
3
5
+20 V
C register readout (see note 14)
10
12
15
+20 V
C12
C register readout (see note 14)
10
12
15
+20 V
1R2
Output reset pulse (A2)
8
12
15
+20 V
26
RD2
Reset transistor drain (A2)
17
22
70.3 to +25 V
27
OS2
Output transistor source (A2)
28
OD2
Output transistor drain (A2)
29
DD
Dump drain
30
B13
Section B drive pulse
31
B12
Section B drive pulse
32
B11
Section B drive pulse
33
SS
Substrate (see note 12)
0
9
10
±
34
A11
Section A drive pulse
10
12
15
+20 V
35
A12
Section A drive pulse
10
12
15
+20 V
10
12
15
+20 V
±
±
±
±
36
A13
Section A drive pulse
37
±
No connection
38
±
No connection
39
ABD
Anti-blooming drain (see note 11)
15
see note 15 27
70.3 to +30 V
29
30
70.3 to +30 V
20
22
25
70.3 to +25 V
10
12
15
+20 V
10
12
15
+20 V
10
12
15
+20 V
±
±
±
±
20
22
25
70.3 to +25 V
40
±
No connection
±
±
±
±
41
±
No connection
±
±
±
±
42
DG
Dump gate (see note 10)
75
0
1
+20 V
75
0
1
+20 V
±
±
±
±
43
IG
Isolation gate (see note 9)
44
±
No connection
CCD55-30, page 6
#2000 Marconi Applied Technologies
Voltages between pairs of pins:
pin 16 (OD1) to pin 17 (OS1) . . . . . . +15 V pin 16 (OD1) to pin 18 (DOS1) . . . . . +15 V pin 27 (OS2) to pin 28 (OD2) . . . . . . +15 V Current through OD1 . . . . . . . . . . 20 mA Current through any other source or drain pin . . 10 mA Operation at the typical voltages should give performance at, or close to, the specification limits. Some adjustment within the specified range may be required to optimise performance.
OUTPUT AMPLIFIER SCHEMATICS Low Noise (A2) RD2
C13
1R2
B13 (SEE NOTE 16)
7857
OD2
OG OS2
OUTPUT
EXTERNAL LOAD (SEE NOTE 17)
SS
SS
0V
Large Signal (A1) RD1
C13
1R1
B13 (SEE NOTE 16)
7858
OD1
OG OS1
EXTERNAL LOAD (SEE NOTE 18)
DOS1
SS
SS
OUTPUT
0V
NOTES 8. 9. 10. 11. 12. 13. 14. 15. 16. 17. 18.
All image clock low levels 0 + 0.5 V. Other clock low levels + 1 V. Charge can be reverse clocked into the drain at the top of the device. During this period of clocking, VIG should be 12 + 2 V. Non-charge dumping level shown. For charge dumping, DG should be pulsed to 12 + 2 V. The device has no antiblooming but a drain bus is present above section A and must be biased to prevent charge injection. The isolation gate is between this bus and the first A11 electrode. The substrate voltage may need to be adjusted within the range indicated to achieve correct inverted mode operation. With a 7.5 mA constant current load, VOS = VRD + 6 V. Readout through amplifier 2 shown; for readout through amplifier 1, C11 and C12 should be interchanged. With a 5 mA constant current load, VOS = VRD + 6 V. The amplifier has a DC restoration circuit which is internally activated whenever B13 is high. Load not critical, can be 5 mA constant current supply or a 5 kO resisror. Load not critical, can be 7.5 mA constant current supply or a 3.3 kO resisror.
#2000 Marconi Applied Technologies
CCD55-30, page 7
FRAME READOUT TIMING DIAGRAM READOUT PERIOD 51152 CYCLES
SEE DETAIL OF LINE TRANSFER
7873
CHARGE COLLECTION PERIOD
I11 I12
I13 SEE DETAIL OF OUTPUT CLOCKING C11
C12
C13
1R
OUTPUT
FIRST VALID DATA
DETAIL OF LINE TRANSFER twi
7874
I11 1
toi
/3 Ti
I12
toi
tli
I13
tdri
tdir
C11
C12
C13
1R
Note
I11 = A11 + B11, I12 = A12 + B12, I13 =A13 + B13.
CCD55-30, page 8
#2000 Marconi Applied Technologies
DETAIL OF OUTPUT CLOCKING
7133B
C11 Tr
tor
C12
C13 twx
tdx
1R SIGNAL OUTPUT
OUTPUT VALID OS
RESET FEEDTHROUGH
LINE OUTPUT FORMAT SIGNAL OUTPUT 17 BLANK
*
*
*
17 BLANK
= Partially shielded transition elements
6445B
CLOCK TIMING REQUIREMENTS Symbol Ti twi tri tfi toi tli tdir tdri Tr trr tfr tor twx trx, tfx tdx
Description Image clock period Image clock pulse width Image clock pulse rise time (10 to 90%) Image clock pulse fall time (10 to 90%) Image clock pulse overlap Image clock pulse, two phase low Delay time, I1 stop to R1 start Delay time, R1 stop to I1 start Output register clock cycle period Clock pulse rise time (10 to 90%) Clock pulse fall time (10 to 90%) Clock pulse overlap Reset pulse width Reset pulse rise and fall times Delay time, 1R low to R13 low
Min 10 5 0.5 tri 3 2 3 1 150 10 trr 10 20 10 25
Typical
Max
30 15 2 2 5 5 5 2 see note 20 0.1Tr 0.1Tr 0.5trr 0.1Tr 0.5trr 0.5Tr
see note 19 see note 19 0.5toi 0.5toi 0.2Ti 0.2Ti see note 19 see note 19 see note 19 0.3Tr 0.3Tr 0.1Tr 0.2Tr 0.2Tr 0.8Tr
ms ms ms ms ms ms ms ms ns ns ns ns ns ns ns
NOTES 19. No maximum other than that necessary to achieve an acceptable dark signal at the longer readout times. 20. As set by the readout period.
#2000 Marconi Applied Technologies
CCD55-30, page 9
OUTLINE (All dimensions nominal) Not for inspection purposes 6617A
C B
D
A
E
PROTECTIVE GLASS WINDOW (SEE NOTE)
IMAGE PLANE
G H
Outline Note
F
Ref
Millimetres
A B C D E F G H
53.34 33.02 2.54 3.81 2.29 1.68 43.18 48.26
The device is normally supplied with a temporary glass window for protection purposes. It can also be supplied with a quartz or fibre-optic window where required.
PIN CONNECTIONS (View on Pins) PIN 1 IDENTIFIER
6612A
43
44
2
1
41
42
4
3
39
40
6
5
37
38
8
7
35
36
10
9
33
34
12
11
31
32
14
13
29
30
16
15
27
28
18
17
25
26
20
19
23
24
22
21
CCD55-30, page 10
#2000 Marconi Applied Technologies
ORDERING INFORMATION
HANDLING CCD SENSORS
Options include: *
Temporary Quartz Window
*
Temporary Glass Window
*
Fibre-optic Coupling
CCD sensors, in common with most high performance MOS IC devices, are static sensitive. In certain cases a discharge of static electricity may destroy or irreversibly degrade the device. Accordingly, full antistatic handling precautions should be taken whenever using a CCD sensor or module. These include:
*
UV Coating
*
Working at a fully grounded workbench
X-ray Phosphor Coating
*
Operator wearing a grounded wrist strap
Backthinned
*
All receiving socket pins to be positively grounded
*
Unattended CCDs should not be left out of their conducting foam or socket.
* *
For further information on the performance of these and other options, please contact Marconi Applied Technologies.
Evidence of incorrect handling will invalidate the warranty. All devices are provided with internal protection circuits to the gate electrodes (pins 2, 8, 9, 10, 12, 13, 14, 20, 21, 22, 23, 24, 25, 29, 30, 31, 32, 34, 35, 36, 42, 43) but not to the other pins.
HIGH ENERGY RADIATION Device parameters may begin to change if subject to an ionising dose of greater than 104 rads. Certain characterisation data are held at Marconi Applied Technologies. Users planning to use CCDs in a high radiation environment are advised to contact Marconi Applied Technologies.
TEMPERATURE LIMITS Min Typical Max Storage . . . . . . . . 73 ± 373 K Operating . . . . . . . . 73 243 323 K Operation or storage in humid conditions may give rise to ice on the sensor surface on cooling, causing irreversible damage. Maximum device heating/cooling . . . . 5 K/min
Whilst Marconi Applied Technologies has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences of any use thereof and also reserves the right to change the specification of goods without notice. Marconi Applied Technologies accepts no liability beyond that set out in its standard conditions of sale in respect of infringement of third party patents arising from the use of tubes or other devices in accordance with information contained herein.
#2000 Marconi Applied Technologies
Printed in England
CCD55-30, page 11