Offer for a PhD position: design of a MEMS digital microphone array The main objective is the development of a digital microphone based on MEMS technologies. The sensor will be composed of an array of pixels designed to process time sampling of pressure waves. Detection methods can be selected among piezoelectric, electrodynamic, piezoresistive and capacitive means. Capacitive detection offer a better energetic efficiency compared to the other methods and could be prefered. This research field requires a mixed background shared on one hand by the LAUM lab. to model and design electroacoustic devices and on the other hand by the Leti lab. to bring the microtechnology and MEMS microfabrication means. A sufficient overlap of the background will ensure a good cooperation between the labs. The student will thus be able to train himself to microfabrication techniques in LAUM and to accomplish simulation in Leti. From a scientific point of view this thesis adresses several key points such as the modeling of an elementary MEMS pixel and the development of techniques to correctly adress and pilot the array of pixels. The thesis will open the path to digital integrated sound transducers which is well in phase with a leading research area in the field of TICs (Techniques for Information and Communication). From an economical point of view the thesis adresses the area of the alldigital electronic products. The objectives of this work shall raise a wide interest in industry for it helps increasing the autonomy of the products by suppressing analog converters. The total power consumption should be proportionaly reduced while improving the audio performance for mobile electronics. To contact us Dr. Stéphane Durand, HDR LAUM UMR CNRS 6613 Rue Aristote 72085 Le Mans Cedex 9 Tél : +33 (0) 243 833 954 Courriel : stephane.durand@univlemans.fr
Dr. Elisabeth Delevoye CEALeti DRT/DSIS/LCFE MINATEC 17 rue des Martyrs 38054 GRENOBLE Cedex 9 Tél: +33 (0) 438 789 173 Courriel :
[email protected]
http://www.ec nantes.fr/version anglaise/education /phd/doctoral schoolspiga science engineering geosciences architecture46320
To know more about our two laboratories LAUM : http://perso.univlemans.fr/~sdurand/ and also http://perso.univlemans.fr/~mbruneau/ campus Minatec http://www.leti.fr/en/DiscoverLeti/Partnerships et CEAleti : http://www.leti.fr/en References 1. P. Honzík, Z. Škvor, S. Durand, M. Bruneau, Theoretical investigation on electrostatic transducers with nonplanar backing electrode, Acta Acustica. 95 (5), septoct 2009, p. 671686. 2. T. Lavergne, S. Durand, Michel Bruneau, Nicolas Joly, D. Rodrigues, "Dynamic behaviour of the circular membrane of an electrostatic microphone: effect of holes in the backing electrode", J. Acoust. Soc. Am. (accepted dec. 2010). 3. Patent : WO 2007/135682 A2, Apparatus for generating pressure and methods of manufacture thereof.