â¢The expanded beam exiting from the light source is divided by a. Beamsplitter into two beams. â¢One beam is reflected from the Reference. Mirror, and the other ...Missing:
•The expanded beam exiting from the light source is divided by a Beamsplitter into two beams. •One beam is reflected from the Reference Mirror, and the other one from the Sample. •These two beams are recombined by the Beamsplitter to interfere. •The imaging lens images the interferogram onto the CCD camera. 4
Tilt of one of Mirrors in Interferometer If one of the mirrors is slightly tilted,
CCD
then the reflected beam (wavefront) also is tilted. Reference Mirror Beamsplitter
If mirror and flat sample are perfectly perpendicular, then reflected wavefronts are parallel.
Sample
For two tilted and flat wavefronts, an interferogram of straight, parallel, light and dark bands will be formed. 5
Interferogram
Interferogram for Flat Wavefronts with Tilt Multiple λ distances between wavefronts, where λ is the wavelength of the source. Interference between two wavefronts is constructive at these multiple λ points, destructive at others, forming an interferogram. Fringe spacing corresponds to λ path difference between wavefronts.
Tested beam (wavefront)
λ
2λ
3λ
4λ
Two interfering wavefronts
Reference beam (wavefront). Intensity profile of interferogram. Interferogram, (interference pattern or fringe pattern)
7
Change in Tilt Causes Change in Number of Fringes.
NULL FRINGES When wavefronts are parallel then the fringes are nulled and almost uniform intensity is visible in the field of view. Press Enter
Test Reference
The number and spacing of fringes changes with tilt. 8
Shape of fringes
Interferograms for Spherical Sample
When one wavefront is spherical and the other is flat, and in addition there is some tilt between interfering wavefronts, then the fringes will be curved. When tilt is not present, the fringes are circular. 10
Interferograms for Spherical Sample The fringes can represent a concave wavefront instead convex wavefront as on previous slide.
11
Typical Interferogram for
Flat Surface
Fringes
λ
2λ
Phase map 3λ 12
Typical Interferogram for
Spherical Surface
Fringes
Phase map
13
Typical Interferogram for
Cylindrical Surfaces
Fringes
Phase map 14
Interference Microscope
Filter Bandwidth and Number of Fringes
• Narrow bandwidth filter (3nm) (in PSI) • Medium bandwidth filter (40nm)
• Wide bandwidth filter (300nm) - white light (in VSI) # of fringes ≈ 2λ/∆λ 16
Interference
Microscope Diagram Digitized Intensity Data
Detector Array Filters all but the red light from white light of halogen lamp
Beamsplitter
Filter
Illuminator Light Source Aperture Stop
Translator Microscope Objective
Field Stop
Mirau Interferometer Sample 17
Michelson Interferometer 1.5X, 2.5X, 5X small divergence of beam long working distance
Working distance Beamsplitter Cube
Microscope Objective
Reference Mirror
New working distance Sample 18
Mirau Interferometer
Microscope Objective Reference
Beamsplitter Plate Sample 19
Mirau Interferometer for Small Magnification?
1.5X, 2.5X, 5X small divergence of beam long working distance
Microscope Objective Reference LARGE central obscuration
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