Alexandra GARRAUD (MENDEZ)
E-mail:
[email protected] Personal address: 15 Rue Roucher 34000 Montpellier, France
Website: garraud.is.free.fr Academic address: University of Montpellier 2, cc 075 Place Eugène Bataillon 34095 Montpellier, France
Objective: To obtain a Post-Doctoral fellowship in the Micro-Sensors sector
University course 2008-2011 PhD Thesis in the Institut d'Électronique du Sud, University of Montpellier 2, France Title: Performance improvements and development of a new concept of temperature
detection for thermal accelerometers Distinction: very honourable with the congratulation of the jury Jury Members: Pr. François FOREST (President), D.R. Lionel BUCHAILLOT (Reviewer), Pr. Pascal VAIRAC (Reviewer), Pr. Daniel GUYOMAR (Examiner), Dr. Philippe COMBETTE (Co-supervisor) et Pr. Alain GIANI (Supervisor)
2008
Research Master's Degree in Nano-systems and Micro-technologies, with honors supervised by ENS Cachan / University of Paris-Sud 11 (5th year at university)
2007
Admitted to the highest academic-rank qualification (Agrégation) in Applied Physics after passing the French national competitive examination
2006
Master's Degree in Applied Physics, with honors supervised by ENS Cachan / University of Paris-Sud 11 (4th year at university)
2005
Bachelor's degree in Electrical Engineering, with honors supervised by ENS Cachan / University of Paris-Sud 11 (3rd year at university)
2004
Admission to the École Normale Supérieure (ENS) de Cachan, one of three prestigious institutes of higher education providing post-graduate degrees to students who will go on to become researchers, engineers or teachers at the end of a four-year program
2002-2004 Scientific “Classes Préparatoires aux Grandes Écoles” (Prep. school) in Physics and Technology
Technical Competences: MEMS and Material Thin-film Deposition
Sputtering: RF, Magnetron, Reactive Sputtering Electron beam physical vapor deposition, Flash evaporation
Clean Room Processes
UV photolithography, Wet etching (HF, TMAH, KOH), Physical etching (RIE) Specific thermal annealing development: RTA, under magnetic field
Observation
Scanning electron microscope, X-ray diffraction, Infrared camera, Optical microscope Stylus profilometer: thickness, surface roughness, Mechanical stress
Thin-Film Characterization
4-point probes method, Ellipsometry (thickness) Electrical impedance spectroscopy Ferroelectric properties measurements: remanent polarization, coercive field, fatigue Ferromagnetic properties measurements: coercive field, permeability
Sensor Characterization
Steady and Dynamic test benches for accelerometers Instrumentation, Embedded electronic board design
Research activities 2008-2011 Preparation of PhD Thesis in the Institut d'Électronique du Sud Performance improvements and development of a new concept of temperature detection for thermal accelerometers This PhD thesis deals with both the production and study of micro-accelerometers based on thermal convection. Under acceleration conditions, convective heat transfers into a locally heated fluid are modified and induce a change in temperature profile. Using a fluid as seismic mass improves sensor performances compared to traditional accelerometers, e.g. high shock reliability. One goal was to develop and characterize high-g accelerometers (≥10,000 g). Furthermore, analytical studies carried out in parallel have allowed us to improve our understanding of the thermal behavior of the enclosed fluid. Effects of thermo-physical parameters, experimental set-up and sensor size on both sensitivity and bandwidth were deduced. On the other hand, a new concept of thermal detectors for these accelerometers based on the use of pyroelectric material was undertaken to improve sensor sensitivity as well as bandwidth. The thin-film sputtering process was first developed and then the pyroelectric thermal accelerometer principle was checked and confirmed.
2008
Research Master Internship in the Institut d'Électronique Fondamentale (University Paris 11), supervised by J. MOULIN
Development and characterization of Giant Magneto-Impedance micro-sensors for nondestructive testing
During this research master internship, production and characterization of a giant magnetoimpedance micro-sensor for contactless detection were carried out. The device is composed of a three thin-film layer stack whose overall impedance is modified under the influence of an external magnetic field. Ferromagnetic parameters such as coercive field or magnetic permeability are key elements in obtaining large impedance variations i.e. high sensitivity. The first step consisted of a study of ferromagnetic thin-film sputtered characteristics with respect to sputtering parameters such as plasma power or pattern size. Then an optimization stage was undertaken on both deposition and thermal annealing processes. Finally, microtechnology procedures used for sensor production such as photolithography were developed to avoid production rejects.
2006
Master Internship in the Laboratoire d'Électricité Générale at the École Supérieure de Physique et de Chimie Industrielles de la Ville de Paris” (ESPCI, France) supervised by S. HOLÉ
Direct electrical characterization on a Schottky diode using an acousto-electric pulse Metal sputtering on silicon Charge profile analysis versus metal sputtered and semi-conductor work functions
Teaching Experiences 2010-2011 Teacher in a student project, Construction of a Weather Station (2nd year at university) 2008-2011 Teacher in Sensors, Bachelor Degree (3rd year at university) (University of Montpellier 2) 2008-2011 Teacher in Mathematics applied to Electronics, Associate Degree (1st year at university) 2011
Voluntary worker as teacher for schoolboys in a socially challenged district of Montpellier
2006-2008 Private mathematics teacher for two schoolboys and one high-school pupil
Activities of General Interest 2009-2010 Organization coordinator of a national PhD Student Meeting, JNRDM (French
Meeting of PhD students in Micro-Electronics) 2010 in Montpellier (www.jnrdm2010.fr French website)
2009
Representative of the PhD Students of the Laboratory Institut d'Électronique du Sud for the evaluation of the Evaluation Agency for Research and Higher (AÉRES)
Trainee Supervisions Master's Degree Level 2009
M. RICHARD, Characterization and Analytical Modeling of Two-Axis CMOS Thermal Accelerometers, ENS Cachan / University Paris-Sud 11
2010
E. ZRAIK, Familiarization with an autonomous data-recorder electronic system and application to measure very high accelerations, University Montpellier 2
2010
G. LAVAITTE, Development and characterization of pyroelectric thin films, University Montpellier 2
2010
P.A. DÉLÉAN, Development and characterization of ultra-stable platinum thin films, University Montpellier 2,
Research Master's Degree Level 2009-2010 R. GRAFTIAUX, Study of the embedding effect on Sensitivity of a Thermal Accelerometer and Characterization of Two-Axis Platinum Thermal Accelerometers, University Montpellier 2
2010-2011 P. BOUET, Characterization of ultra-stable platinum thin films and Characterization of TwoAxis Platinum Thermal Accelerometers, University Montpellier 2
Personal Interests Languages spoken French (Mother tongue) Fluent English (TOEIC®: 910/990) Fluent Spanish Italian: fair reading, poor speaking and writing
Software Microsoft Office Suite, Open Office Suite, LaTeX Matlab, Mapple
Voluntary worker of Secours Catholique, Caritas France
Academic Publishing International journals with peer-review 1. “A Dual Axis CMOS micromachined convective thermal accelerometer” A Garraud, A Giani, P Combette, B Charlot and M Richard, Sensors and Actuators A: Physical, 170(1-2), 44-50, 2011. 2. “Effect of the detector width and gas pressure on the frequency response of a micromachined thermal accelerometer” A Garraud, P Combette, J Courteaud and A Giani, Micromachines, 2(2), 167-178, 2011. 3. “PVDF/PMMA blend thin film pyroelectric sensors” B Charlot, S Gauthier, A Garraud, P Combette and A Giani, Journal of Materials Science: Materials in Electronics, 22, 1766-1771, 2011. 4. “Frequency response analysis of an accelerometer based on thermal convection” A Garraud, P Combette, F Pichot, J Courteaud, B Charlot and A Giani, Journal of Micromechanics and Microengineering, 21, 035017, 2011. 5. “Internal stress influence on the coercivity of FeCuNbSiB thin films” J Moulin, F Mazaleyrat, A Mendez and E Dufour-Gergam, Journal of Magnetism and Magnetic Materials, 322, 12751278, 2010.
Invited talks 6. “Accéléromètres thermiques convectifs à haute étendue de mesure”(in French), A Garraud, P Combette, B Charlot et A Giani, Journées annuelles du Groupement de Recherche Micro et Nano Systèmes (GDR MNS), Marseille, France, 2011.
International conferences with proceedings 7. Poster, “First high-g measurement by thermal accelerometers” A Garraud, P Combette, J M Gosalbes, B Charlot and A Giani, International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Beijing, Chine, 2011. 8. Oral presentation, “A closed-loop micromachined accelerometer based on thermal convection” A Garraud, P Combette, B Charlot, P Loisel and A Giani, Symposium of Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Aix-en-Provence, France, 2011. 9. Oral presentation, “A dual-axis CMOS frontside bulk micromachined thermal accelerometer” A Garraud, A Giani, P Combette, B Charlot and M Richard, Symposium of Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Séville, Espagne, 2010. 10. Oral presentation, “Frequency response of an accelerometer based on thermal convection” A Giani, P Combette, N Crespy, J Courteaud, A Garraud, F Pascal-Delannoy and B Charlot, Symposium of Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Rome, Italie, 2009.
National communications (in French) 11. Poster, « Accéléromètre thermique à haute étendue de mesure » A Garraud, P Combette, E Zraik, J M Gosalbes, B Charlot and A Giani, Journées nationales du Groupement de Recherche Micro et Nano Systèmes (GDR MNS), Lyon, France, 2010. 12. Oral presentation, « Fabrication et caractérisation d’un micro-accéléromètre thermique à grande étendue de mesure » A Garraud, P Combette, B Charlot and A Giani, Journées Nationales du réseau Doctoral en Microélectronique (JNRDM), Lyon, France, 2009. 13. Poster, « Fabrication et caractérisation d’un accéléromètre thermique à grande étendue de mesure » A Garraud, P Combette, B Charlot and A Giani, Journées nationales du Groupement de Recherche Micro et Nano Systèmes (GDR MNS), Montpellier, France, 2008.
